diff --git a/esphome/components/deep_sleep/deep_sleep_component.h b/esphome/components/deep_sleep/deep_sleep_component.h
index be56b529ba..7a640b9ea5 100644
--- a/esphome/components/deep_sleep/deep_sleep_component.h
+++ b/esphome/components/deep_sleep/deep_sleep_component.h
@@ -34,10 +34,12 @@ enum WakeupPinMode {
   WAKEUP_PIN_MODE_INVERT_WAKEUP,
 };
 
+#if defined(USE_ESP32) && !defined(USE_ESP32_VARIANT_ESP32C3)
 struct Ext1Wakeup {
   uint64_t mask;
   esp_sleep_ext1_wakeup_mode_t wakeup_mode;
 };
+#endif
 
 struct WakeupCauseToRunDuration {
   // Run duration if woken up by timer or any other reason besides those below.
@@ -114,7 +116,11 @@ class DeepSleepComponent : public Component {
 #ifdef USE_ESP32
   InternalGPIOPin *wakeup_pin_;
   WakeupPinMode wakeup_pin_mode_{WAKEUP_PIN_MODE_IGNORE};
+
+#if !defined(USE_ESP32_VARIANT_ESP32C3)
   optional<Ext1Wakeup> ext1_wakeup_;
+#endif
+
   optional<bool> touch_wakeup_;
   optional<WakeupCauseToRunDuration> wakeup_cause_to_run_duration_;
 #endif